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<br /> MICRO-ELECTRO-MECHANICAL<br /> SYSTEMS SOLUTIONS<br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> 02<br /> 11<br /> in partnership with<br /> <br /> <br /> IN THIS ISSUE<br /> WAFER BONDING SYSTEMS | MEMS NEWS | LIGA<br /> FOCUS ON MEMS FABRICATION<br /> www.micromanu.com memstechreview<br /> <br /> MEMS q&a<br /> MEMS Q&A with Iain Rutherford, Product Marketing Manager MEMS, X-FAB<br /> <br /> Could you tell us about X-<br /> FAB<a title="MEMS technology review 1/1 page 1" href="http://viewer.zmags.com/publication/49e209e6?page=1">MICRO-ELECTRO-MECHANICALSYSTEMS SOLUTIONS</a> MICRO-ELECTRO-MECHANICALSYSTEMS SOLUTIONS<a title="MEMS technology review 1/1 page 2" href="http://viewer.zmags.com/publication/49e209e6?page=2"></a> <a title="MEMS technology review 1/1 page 3" href="http://viewer.zmags.com/publication/49e209e6?page=3">MEMS q&aMEMS Q&A with Iain Rutherford, Product M</a> MEMS q&aMEMS Q&A with Iain Rutherford, Product M<a title="MEMS technology review 1/1 page 4" href="http://viewer.zmags.com/publication/49e209e6?page=4">MEMS newsBosch SMP137 Marks Entry into the Inte</a> MEMS newsBosch SMP137 Marks Entry into the Inte<a title="MEMS technology review 1/1 page 5" href="http://viewer.zmags.com/publication/49e209e6?page=5">MEMS newsFreescale Qorivva Microcontrollers Tri</a> MEMS newsFreescale Qorivva Microcontrollers Tri<a title="MEMS technology review 1/1 page 6" href="http://viewer.zmags.com/publication/49e209e6?page=6">MEMS newsTOK Joins CEA-Leti IMAGINE Program to </a> MEMS newsTOK Joins CEA-Leti IMAGINE Program to <a title="MEMS technology review 1/1 page 7" href="http://viewer.zmags.com/publication/49e209e6?page=7">Next-GenerationWafer Bonding SystemsEV Group (E</a> Next-GenerationWafer Bonding SystemsEV Group (E<a title="MEMS technology review 1/1 page 8" href="http://viewer.zmags.com/publication/49e209e6?page=8">8 MEMS technology review 1/1 www.micromanu.c</a> 8 MEMS technology review 1/1 www.micromanu.c<a title="MEMS technology review 1/1 page 9" href="http://viewer.zmags.com/publication/49e209e6?page=9">MEMS focus MEMS FABRICATION </a> MEMS focus MEMS FABRICATION <a title="MEMS technology review 1/1 page 10" href="http://viewer.zmags.com/publication/49e209e6?page=10">MEMS focus MEMS FABRICATIONFigure 3.1. The Ite</a> MEMS focus MEMS FABRICATIONFigure 3.1. The Ite<a title="MEMS technology review 1/1 page 11" href="http://viewer.zmags.com/publication/49e209e6?page=11">MEMS focus MEMS FABRICATIONABOV</a> MEMS focus MEMS FABRICATIONABOV<a title="MEMS technology review 1/1 page 12" href="http://viewer.zmags.com/publication/49e209e6?page=12">MEMS focus MEMS FABRICATIONassembly for inte</a> MEMS focus MEMS FABRICATIONassembly for inte<a title="MEMS technology review 1/1 page 13" href="http://viewer.zmags.com/publication/49e209e6?page=13">MEMS focus MEMS FABRICATION</a> MEMS focus MEMS FABRICATION<a title="MEMS technology review 1/1 page 14" href="http://viewer.zmags.com/publication/49e209e6?page=14">MEMS insightDr. Joachim Schulz, microworksA </a> MEMS insightDr. Joachim Schulz, microworksA <a title="MEMS technology review 1/1 page 15" href="http://viewer.zmags.com/publication/49e209e6?page=15"></a> <a title="MEMS technology review 1/1 page 16" href="http://viewer.zmags.com/publication/49e209e6?page=16"></a>