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<br /> MICRO-ELECTRO-MECHANICAL 05<br /> SYSTEMS SOLUTIONS<br /> <br /> <br /> <br /> 11<br /> in partnership with<br /> <br /> IN THIS ISSUE<br /> MEMS IN QUALITY OF LIFE APPLICATIONS<br /> MICRO FLUIDICS<br /> CMOS ASIC INTEGRATION<br /> <br /> www.micromanu.com memstechreview<br /> <br /> contents<br /> MAY 2011<br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> 1<br /> <br /> ON THE COVER<br /> <br /> LifeMarkerChip searching<br /> for life on Mars.<br /> <br /> Image courtesy of LioniX.<br /> <br /> See page 5 for this<br /> issue's Foundry Focus,<br /> featuring LioniX.<br /> <br /> <br /> 6&<a title="MTR 1_3 page 1" href="http://viewer.zmags.com/publication/d47782fc?page=1">MICRO-ELECTRO-MECHANICAL 05SYST</a> MICRO-ELECTRO-MECHANICAL 05SYST<a title="MTR 1_3 page 2" href="http://viewer.zmags.com/publication/d47782fc?page=2"></a> <a title="MTR 1_3 page 3" href="http://viewer.zmags.com/publication/d47782fc?page=3">contents MAY 20111ON THE C</a> contents MAY 20111ON THE C<a title="MTR 1_3 page 4" href="http://viewer.zmags.com/publication/d47782fc?page=4">05 11 – Vol. 1 No. 3Website: www.micromanu.com</a> 05 11 – Vol. 1 No. 3Website: www.micromanu.com<a title="MTR 1_3 page 5" href="http://viewer.zmags.com/publication/d47782fc?page=5">MEMS/MST basedcompanies going fablessis the tre</a> MEMS/MST basedcompanies going fablessis the tre<a title="MTR 1_3 page 6" href="http://viewer.zmags.com/publication/d47782fc?page=6">MEMS newsPolytec's UHF-120 Vibrometer Wins the</a> MEMS newsPolytec's UHF-120 Vibrometer Wins the<a title="MTR 1_3 page 7" href="http://viewer.zmags.com/publication/d47782fc?page=7">MEMS newsVTI GyroEnablesEarth's Rotationto b</a> MEMS newsVTI GyroEnablesEarth's Rotationto b<a title="MTR 1_3 page 8" href="http://viewer.zmags.com/publication/d47782fc?page=8">MEMS newsGrowth at Top 20 MEMS foundries lagsm</a> MEMS newsGrowth at Top 20 MEMS foundries lagsm<a title="MTR 1_3 page 9" href="http://viewer.zmags.com/publication/d47782fc?page=9">q&a VTTMEMSQ&Awith Hannu Kattelus,CEO,VTT</a> q&a VTTMEMSQ&Awith Hannu Kattelus,CEO,VTT<a title="MTR 1_3 page 10" href="http://viewer.zmags.com/publication/d47782fc?page=10"></a> <a title="MTR 1_3 page 11" href="http://viewer.zmags.com/publication/d47782fc?page=11">issue focus QUALITY OF LIFEMEMS forQualiot</a> issue focus QUALITY OF LIFEMEMS forQualiot<a title="MTR 1_3 page 12" href="http://viewer.zmags.com/publication/d47782fc?page=12">issue focus QUALITY OF LIFE Bob S</a> issue focus QUALITY OF LIFE Bob S<a title="MTR 1_3 page 13" href="http://viewer.zmags.com/publication/d47782fc?page=13">issue focus QUALITY OF LIFEDr. Daniel P. Siewio</a> issue focus QUALITY OF LIFEDr. Daniel P. Siewio<a title="MTR 1_3 page 14" href="http://viewer.zmags.com/publication/d47782fc?page=14">issue focus QUALITY OF LIFEDr. Jeffrey T. Bor</a> issue focus QUALITY OF LIFEDr. Jeffrey T. Bor<a title="MTR 1_3 page 15" href="http://viewer.zmags.com/publication/d47782fc?page=15">issue focus QUALITY OF LIFEDonna Sandfox, Produ</a> issue focus QUALITY OF LIFEDonna Sandfox, Produ<a title="MTR 1_3 page 16" href="http://viewer.zmags.com/publication/d47782fc?page=16">issue focus QUALITY OF LIFEDr. Randy Goodall, </a> issue focus QUALITY OF LIFEDr. Randy Goodall, <a title="MTR 1_3 page 17" href="http://viewer.zmags.com/publication/d47782fc?page=17"></a> <a title="MTR 1_3 page 18" href="http://viewer.zmags.com/publication/d47782fc?page=18">feature MICRO FLUIDICSMicro Fluidic Cartridges</a> feature MICRO FLUIDICSMicro Fluidic Cartridges<a title="MTR 1_3 page 19" href="http://viewer.zmags.com/publication/d47782fc?page=19">Thomas Gessner,Director of FraunhoferInstitute </a> Thomas Gessner,Director of FraunhoferInstitute <a title="MTR 1_3 page 20" href="http://viewer.zmags.com/publication/d47782fc?page=20">feature CMOS ASIC INTEGRATIONIain Rutherford,</a> feature CMOS ASIC INTEGRATIONIain Rutherford,<a title="MTR 1_3 page 21" href="http://viewer.zmags.com/publication/d47782fc?page=21">What is CMOS ASICintegration with MEMS?MEMS ar</a> What is CMOS ASICintegration with MEMS?MEMS ar<a title="MTR 1_3 page 22" href="http://viewer.zmags.com/publication/d47782fc?page=22">feature CMOS ASIC INTEGRATION</a> feature CMOS ASIC INTEGRATION<a title="MTR 1_3 page 23" href="http://viewer.zmags.com/publication/d47782fc?page=23"></a> <a title="MTR 1_3 page 24" href="http://viewer.zmags.com/publication/d47782fc?page=24"></a>